Formation and Study of Properties of TA And MO Nanocluster Films

Kozlova, T I; Vasilyev, O S; Borisyuk, P V; Lebedinskii, Yu Yu; Kozlova, T I; Vasilyev, O S; Borisyuk, P V; Lebedinskii, Yu Yu

dc.contributor		en-US
dc.creator	Kozlova, T I
dc.creator	Vasilyev, O S
dc.creator	Borisyuk, P V
dc.creator	Lebedinskii, Yu Yu
dc.creator	Kozlova, T I
dc.creator	Vasilyev, O S
dc.creator	Borisyuk, P V
dc.creator	Lebedinskii, Yu Yu
dc.date	2017-10-16
dc.date.accessioned	2018-02-23T17:16:21Z
dc.date.available	2018-02-23T17:16:21Z
dc.identifier	https://knepublishing.com/index.php/KnE-Engineering/article/view/1095
dc.identifier	10.18502/keg.v2i3.1095
dc.identifier.uri	http://ridda2.utp.ac.pa/handle/123456789/4299
dc.description	In the work the results of studies of thin-film samples of nanoclusters of tantalum and molybdenum metals on the surface of silicon dioxide SiO2/Si (001) at room temperature are presented. The chemical composition and electronic structure of the obtained nanocluster films of Ta and Mo were controlled in situ by X-ray photoelectron spectroscopy (XPS). Susceptibility to oxidation during the exposure to the atmosphere of then nanocluster films, as well as their thermal stability when heated in a vacuum to 600 °C were studied ex situ by the XPS method. The size and shape of the nanoclusters composing the film were estimated ex situ by analyzing images obtained with a scanning electron microscope. The band structure before and after oxidation was studied by measuring the bandgap of the formed Ta and Mo films by the method of electron energy loss characteristic spectroscopy (REELS). Conclusions about thermoelectric properties of the formed nanocluster films of Ta and Mo were made.	en-US
dc.format	application/msword
dc.format	application/pdf
dc.format	application/xml
dc.language	eng
dc.publisher	KnE Publishing	en-US
dc.relation	https://knepublishing.com/index.php/KnE-Engineering/article/view/1095/2633
dc.rights	info:eu-repo/semantics/openAccess
dc.rights	https://creativecommons.org/licenses/by/4.0/
dc.source	2518-6841
dc.source	KnE Engineering; Breakthrough directions of Scientific Research in NRNU MEPhI: Development Perspectives in the Framework of the Strategic	en-US
dc.title	Formation and Study of Properties of TA And MO Nanocluster Films	en-US
dc.type	info:eu-repo/semantics/article
dc.type	info:eu-repo/semantics/publishedVersion

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